KITZ MICRO FILTER CORPORATION Industrial Filter Product Catalog - GAS LINE FILTER (For the semiconductor industry)- All Metallic GAS LINE FILTER

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Fuji Film Micro Filter

All Metallic Gas Line Filter Capable of High-Temperature Baking

Extra-high purification of gases for semiconductor manufacturing processes can be successfully completed by clarifying all the processes from the filling technology, transport technology, storage to gas supply system.
The all metallic gas line filter whose components are solely made of SUS316L is capable of high-temperature baking.
High-temperature baking effectively improves the yield, espacially decreasing the non-uniformity of highly monolithic wafers of 16MB or larger, by removing such degasification elements as H2O.
Yet, since such particles as silica are generated in response to the contact with H2O, depending upon the kind of gas, the high-temperature baking process is indispensable to avoid the contamination of such elements as H2O.
Our filter is compact and all made of stainless, which enables to supply gasses to the point at which the gasses are used without decreasing the purity.

Features

Capable of High-Temperature Baking.
The components are all made of metal. We used SUS316L for all the filter elements and housing.
The filter has high heat resistance, and it is capable of high-temperature baking.
High Retention Rate Realised.
The filter media is composed of fiber sintered material made of SUS316L and demonstrates the high retention rate of 99.999999% or more for the particulate of 0.01µm.
Precision Cleaning Done to Enable You to Use the Filter Immediately.
We have done complete precision cleaning to all the used components. In addition, the manufacturing processes are performed in the clean room. There are few attached particles, which enables you to use the filter immediately. Yet the amount of left ions is maintained small.
Mirror Finish Done the Internal Surface to Prevent Burning.
We have done mirror finish to the internal surface by special electro polishing, which enables you to obtain the superior corrosion resistance and easiness in cleaning. The adoption of the welding method with the appropriate ventilation control of inert gases keeps the internal surface of housing from burning. Therefore, you can prevent the danger of dusting, and the amount of degasification is kept low.
The Assembly Method with a Small Number of Welding Points
The setting of filter element to the housing is not by welding but by a mechanical method, which prevents the decrease of the retention rate due to the burning of internal surface and to the heat-causing deformation of filter element.
Good Quality Control
We have implemented the integrity test, pressure test and gas leak test for all the products, and all of them have their own rate due to the burning of internal surface and to the heat-causing deformation of filter element.

Application

For the purification of various gases for semiconductor manufacturing (general gases and special gases) and of the vacuum system in the semiconductor industry. The filters set in the pipe retains such particles as metallic fine powder generated by the motions of the pressure-reducing valve, pressure gage, valve, etc. Above all, for the process where high-temperature baking of 16MB or more effectively increase the yield.

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