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| Capable of retaining the particles inside the gas supplying pipe and supplying raw material gases to the point at which the gasses are used without decreasing the purity. |
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Extra-high purification of gases for semiconductor manufacturing processes can be successfully completed by clarifying all the processes from the filling technology, transport technology, storage to gas supply system.
Fuji Film Micro Filter,AstroPore Gas Line Filter, is a high performance filter that supplies gases to the point at which the gasses are used without decreasing the purity by setting the filter inside the gas supplying pipe in the clean room.
By removing metallic fine powder generated by the motions of the pressure-reducing valve, pressure gage, valve, etc.,which contributes to the high integration, high performance, and high quality.
We can provide three types of gas line filters : for low flow rate, for midium flow rate, and for high flow rate.
Please selectively use them, depending upon the gas pressure and flow amount to be filtered. |
Features
- PTFE(Polytetrafluoroethylene)Laminate Membrane Realizing High Retention Rate and Stable Filtration Operation
The ultraprecise filtration membrane is PTFE-made two-layer laminate membrane. It does not stretch even with high differential pressure, vibration, etc., and it enables stable operation. In addition, we have verified the retention rate of 99.999999% for the particulate
of 0.01µm with the reliable condensation nuclear particle counter, which assures extremely high ultraprecise filtration performance.
- Realized High Flow Rate/Low Pressure Drop
The membrane has a two-layer structure and many empty pores, which enables you to obtain low pressure drop and high flow rate.
Especially, the disc filter, with its membrane lamination layer structure with low resistance flow paths, has low pressure drop, which enables you to realize a long gas line and multiple staged filtration system.
- Components with High Corrosion Resistance and Usable for Active Gases
We use chemically stable fluororesin for the membrane, base material, O-ring , etc. among the components and SUS316L for the housing. The materials are superior corrosion resistance and, in addition, high heat resistance, which enables baking.
- Precision Cleaning Done to Enable You to Use the Filter Immediately.
We have done complete precision cleaning to all the used components. In addition, the manufacturing processes are performed in the clean room. There are few attached particles, which enables you to use the filter immediately.
Yet the amount of left ions is maintained small.
- Mirror Finish Done to the Internal Surface to Prevent Burning, Welding Technique Preventing the Burning of Internal Surface.
We have done mirror finish to the internal surface by forming passivation membrane through electro polishing, which enables you to obtain the superior corrosion resistance and easiness in cleaning. The adoption of the welding method with the appropriate ventilation
control of inert gases and the welding keep the internal surface of housing from burning. Therefore, you can prevent the danger of dusting.
- Good Quality Control
We have implemented the integrity test, pressure test and gas leak test for all the gas line filters, and all of them have their own unique numbers you can clearly see.
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Application
- For the purification of various gases for semiconductor manufacturing (general gases and special gases) and of the vacuum system
in the semiconductor industry. The filters set in the pipe retains such particles as metallic fine powder generated by the motions of the pressure-reducing valve, pressure gage, valve, etc.
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