KITZ MICRO FILTER CORPORATION Industrial Filter Product Catalog - GAS LINE FILTER (For the semiconductor industry)- All Metllic GAS LINE FILTER

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Fuji Film Micro Filter

All Fluororesin Type with High Corrosion Resistance.
Easy-to-Handle Light Weight Gas Line Filter.

We have added an all fluororesin type to the popular Fuji Film Micro Filter AstoroPore Gas Line Filter Series.
We use fluororesin all the components including membrane and housing.
Compared with the stainless housing type, it is much more appropriate for the cases where it is concerned that moisture in the gases and pipe may corrode the internal surface of housing.
Yet its light weight does not impose a burden on the pipe.
It contributes to the high integration, high performance, and high quality of semiconductor devices.

Features

All the Components Made of Fluororesin and High Corrosion Resistance
We use chemically stable fluororesin for the membrane, base material, housing, etc. among the components, which prevents rusting and demonstrates high corrosion resistance.
Light Weight Type
The weight is 60g, approximately one third of the stainless housing type. It is easy to handle and impose just a small weight burden on the pipe.
PTFE(Polytetrafluoroethylene)Laminate Membrane Realizing High Retention Rate and Stable Filtration Operation
The ultraprecise filtration membrane is PTFE-made two layer laminate membrane. It does not strech even with high differential pressure, vibration, etc., and it enables stable operation.
Realized High Flow Rate/Low Pressure Drop
The membrane has a two-layer structure and many empty pores, which enables you to obtain low pressure drop and high flow rate.
Good Quality Control
We have implemented the integrity test, pressure test and gas leak test for all the gas line filters, and all of them have their own unique numbers you can clearly see.

Application

For the Purification of General Gases for Semiconductor Manufacturing in the Semiconductor Industry.
For the bubbling N2 to the hydrofluoric acid bath and mixed acid bath and bubbling air of the cleaner.
The filters set in the pipe retains such particles as metallic fine powder generated by the motions of the pressure-reducing valve, pressure gage, valve, etc.
For N2 for the compressing of chemicals.
For N2 for the sealing of pure water tank.

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